|
TYPE/DOPANT |
ORIENTATION |
RESISTIVITY |
THICKNESS |
FLAT |
TTV |
BOW/WARP |
PARTICLES |
SURFACE |
P/Boron |
<100>
+/- 1 deg. |
1-100
ohm-cm |
750-800
um |
Notched
- SEMI |
<10
um |
<100
um |
<=50@>=0.2um |
Polished/Polished |
P/Boron |
<100>
+/- 1 deg. |
1-100
ohm-cm |
750-800
um |
Notched
- SEMI |
<10
um |
<100
um |
<=50@>=0.12um |
Polished/Polished |
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TYPE/DOPANT |
ORIENTATION |
RESISTIVITY |
THICKNESS |
FLAT |
TTV |
BOW/WARP |
PARTICLES |
SURFACE |
P/Boron |
<100>
+/- 1 deg. |
1-100
ohm-cm |
700-750
um |
Notched
- SEMI |
<10
um |
<50
um |
<=30@>=0.2um |
Polished/Etched |
P/Boron |
<100>
+/- 1 deg. |
1-50
ohm-cm |
700-750
um |
Notched
- SEMI |
<10
um |
<50
um |
<=30@>=0.2um |
Polished/Etched |
P/Boron |
<100>
+/- 1 deg. |
1-20
ohm-cm |
700-750
um |
Notched
- SEMI |
<10
um |
<30
um |
<=30@>=0.2um |
Polished/Etched |
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TYPE/DOPANT |
ORIENTATION |
RESISTIVITY |
THICKNESS |
FLAT |
TTV |
BOW/WARP |
PARTICLES |
SURFACE |
P/Boron |
<100>
+/- 1 deg. |
1-100 ohm-cm |
650-700 um |
Single - SEMI |
<10 um |
<50 um |
<=30@>=0.2um |
Polished/Etched |
P/Boron |
<100>
+/- 1 deg. |
1-50 ohm-cm |
650-700 um |
Single - SEMI |
<10 um |
<50 um |
<=30@>=0.2um |
Polished/Etched |
P/Boron |
<100>
+/- 1 deg. |
1-20 ohm-cm |
650-700 um |
Single - SEMI |
<10 um |
<50 um |
<=30@>=0.2um |
Polished/Etched |
P/Boron |
<100>
+/- 1 deg. |
1-10 ohm-cm |
1000 +/- 25
um |
Single - SEMI |
<15 um |
N/A |
N/A |
Polished/Etched |
P/Boron |
<100>
+/- 1 deg. |
1-20 ohm-cm |
1000 +/- 25
um |
Single - SEMI |
<15 um |
N/A |
N/A |
Polished/Etched |
P/Boron |
<100>
+/- 1 deg. |
10-20 ohm-cm |
1000 +/- 25
um |
Single - SEMI |
<15 um |
N/A |
N/A |
Polished/Etched |
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TYPE/DOPANT |
ORIENTATION |
RESISTIVITY |
THICKNESS |
FLAT |
TTV |
BOW/WARP |
PARTICLES |
SURFACE |
N/Phosphorous |
<100>
+/- 1 deg. |
1-10
ohm-cm |
625
+/- 25 um |
SEMI
Standard |
<10
um |
N/A |
<30@>=0.3um |
Polished/Etched |
P/Boron |
<100>
+/- 1 deg. |
1-50
ohm-cm |
625
+/- 25 um |
SEMI
Standard |
<10
um |
N/A |
<30@>=0.3um |
Polished/Etched |
P/Boron |
<111>
+/- 1 deg. |
1-10
ohm-cm |
625
+/- 25 um |
SEMI
Standard |
<10
um |
N/A |
<30@>=0.3um |
Polished/Etched |
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TYPE/DOPANT |
ORIENTATION |
RESISTIVITY |
THICKNESS |
FLAT |
TTV |
BOW/WARP |
PARTICLES |
SURFACE |
N/Phosphorous |
<100>
+/- 1 deg. |
0.1-1.0
ohm-cm |
525
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
N/Phosphorous |
<100>
+/- 1 deg. |
1-20
ohm-cm |
525
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
N/Phosphorous |
<111>
+/- 1 deg. |
1-20
ohm-cm |
525
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
N/Arsenic |
<100>
+/- 1 deg. |
<0.010
ohm-cm |
525
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
N/Arsenic |
<111>
+/- 1 deg. |
<0.010
ohm-cm |
525
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
N/Antimony |
<100>
+/- 1 deg. |
0.005-0.020
ohm-cm |
525
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
N/Antimony |
<111>
+/- 1 deg. |
0.005-0.020
ohm-cm |
525
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
P/Boron |
<100>
+/- 1 deg. |
<0.010
ohm-cm |
525
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
P/Boron |
<100>
+/- 1 deg. |
0.01-0.020
ohm-cm |
525
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
P/Boron |
<100>
+/- 1 deg. |
1-20
ohm-cm |
525
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
P/Boron |
<100>
+/- 1 deg. |
1-20
ohm-cm |
1000
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
P/Boron |
<111>
+/- 1 deg. |
1-20
ohm-cm |
525
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
P/Boron |
<111>
+/- 1 deg. |
0.005-0.020
ohm-cm |
525
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
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|
TYPE/DOPANT |
ORIENTATION |
RESISTIVITY |
THICKNESS |
FLAT |
TTV |
BOW/WARP |
PARTICLES |
SURFACE |
N/Phosphorous |
<100>
+/- 1 deg. |
1-20
ohm-cm |
381
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
N/Arsenic |
<100>
+/- 1 deg. |
<0.010
ohm-cm |
381
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
N/Arsenic |
<111>
+/- 1 deg. |
<0.010
ohm-cm |
381
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
N/Antimony |
<100>
+/- 1 deg. |
0.005-0.020
ohm-cm |
381
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
P/Boron |
<100>
+/- 1 deg. |
<0.010
ohm-cm |
381
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
P/Boron |
<100>
+/- 1 deg. |
1-20
ohm-cm |
381
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
P/Boron |
<111>
+/- 1 deg. |
1-20
ohm-cm |
381
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
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|
TYPE/DOPANT |
ORIENTATION |
RESISTIVITY |
THICKNESS |
FLAT |
TTV |
BOW/WARP |
PARTICLES |
SURFACE |
N/Phosphorous |
<100>
+/- 1 deg. |
0.01-0.10
ohm-cm |
279
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
N/Phosphorous |
<100>
+/- 1 deg. |
1-20
ohm-cm |
279
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
N/Phosphorous |
<111>
+/- 1 deg. |
0.01-0.10
ohm-cm |
279
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
N/Phosphorous |
<111>
+/- 1 deg. |
1-20
ohm-cm |
279
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
P/Boron |
<100>
+/- 1 deg. |
1-20
ohm-cm |
279
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
P/Boron |
<100>
+/- 1 deg. |
0.010-0.020
ohm-cm |
279
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
P/Boron |
<111>
+/- 1 deg. |
<0.010
ohm-cm |
279
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
P/Boron |
<111>
+/- 1 deg. |
1-20
ohm-cm |
279
+/- 25 um |
SEMI
Standard |
<15
um |
N/A |
<30@>=0.3um |
Polished/Etched |
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