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300 mm
TYPE/DOPANT	ORIENTATION	RESISTIVITY	THICKNESS	FLAT	TTV	BOW/WARP	PARTICLES	SURFACE
P/Boron	<100> +/- 1 deg.	1-100 ohm-cm	750-800 um	Notched - SEMI	<10 um	<100 um	<=50@>=0.2um	Polished/Polished
P/Boron	<100> +/- 1 deg.	1-100 ohm-cm	750-800 um	Notched - SEMI	<10 um	<100 um	<=50@>=0.12um	Polished/Polished



200 mm
TYPE/DOPANT	ORIENTATION	RESISTIVITY	THICKNESS	FLAT	TTV	BOW/WARP	PARTICLES	SURFACE
P/Boron	<100> +/- 1 deg.	1-100 ohm-cm	700-750 um	Notched - SEMI	<10 um	<50 um	<=30@>=0.2um	Polished/Etched
P/Boron	<100> +/- 1 deg.	1-50 ohm-cm	700-750 um	Notched - SEMI	<10 um	<50 um	<=30@>=0.2um	Polished/Etched
P/Boron	<100> +/- 1 deg.	1-20 ohm-cm	700-750 um	Notched - SEMI	<10 um	<30 um	<=30@>=0.2um	Polished/Etched



150 mm
TYPE/DOPANT	ORIENTATION	RESISTIVITY	THICKNESS	FLAT	TTV	BOW/WARP	PARTICLES	SURFACE
P/Boron	<100> +/- 1 deg.	1-100 ohm-cm	650-700 um	Single - SEMI	<10 um	<50 um	<=30@>=0.2um	Polished/Etched
P/Boron	<100> +/- 1 deg.	1-50 ohm-cm	650-700 um	Single - SEMI	<10 um	<50 um	<=30@>=0.2um	Polished/Etched
P/Boron	<100> +/- 1 deg.	1-20 ohm-cm	650-700 um	Single - SEMI	<10 um	<50 um	<=30@>=0.2um	Polished/Etched
P/Boron	<100> +/- 1 deg.	1-10 ohm-cm	1000 +/- 25 um	Single - SEMI	<15 um	N/A	N/A	Polished/Etched
P/Boron	<100> +/- 1 deg.	1-20 ohm-cm	1000 +/- 25 um	Single - SEMI	<15 um	N/A	N/A	Polished/Etched
P/Boron	<100> +/- 1 deg.	10-20 ohm-cm	1000 +/- 25 um	Single - SEMI	<15 um	N/A	N/A	Polished/Etched



125 mm
TYPE/DOPANT	ORIENTATION	RESISTIVITY	THICKNESS	FLAT	TTV	BOW/WARP	PARTICLES	SURFACE
N/Phosphorous	<100> +/- 1 deg.	1-10 ohm-cm	625 +/- 25 um	SEMI Standard	<10 um	N/A	<30@>=0.3um	Polished/Etched
P/Boron	<100> +/- 1 deg.	1-50 ohm-cm	625 +/- 25 um	SEMI Standard	<10 um	N/A	<30@>=0.3um	Polished/Etched
P/Boron	<111> +/- 1 deg.	1-10 ohm-cm	625 +/- 25 um	SEMI Standard	<10 um	N/A	<30@>=0.3um	Polished/Etched



100 mm
TYPE/DOPANT	ORIENTATION	RESISTIVITY	THICKNESS	FLAT	TTV	BOW/WARP	PARTICLES	SURFACE
N/Phosphorous	<100> +/- 1 deg.	0.1-1.0 ohm-cm	525 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched
N/Phosphorous	<100> +/- 1 deg.	1-20 ohm-cm	525 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched
N/Phosphorous	<111> +/- 1 deg.	1-20 ohm-cm	525 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched
N/Arsenic	<100> +/- 1 deg.	<0.010 ohm-cm	525 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched
N/Arsenic	<111> +/- 1 deg.	<0.010 ohm-cm	525 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched
N/Antimony	<100> +/- 1 deg.	0.005-0.020 ohm-cm	525 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched
N/Antimony	<111> +/- 1 deg.	0.005-0.020 ohm-cm	525 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched
P/Boron	<100> +/- 1 deg.	<0.010 ohm-cm	525 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched
P/Boron	<100> +/- 1 deg.	0.01-0.020 ohm-cm	525 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched
P/Boron	<100> +/- 1 deg.	1-20 ohm-cm	525 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched
P/Boron	<100> +/- 1 deg.	1-20 ohm-cm	1000 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched
P/Boron	<111> +/- 1 deg.	1-20 ohm-cm	525 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched
P/Boron	<111> +/- 1 deg.	0.005-0.020 ohm-cm	525 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched



75 mm
TYPE/DOPANT	ORIENTATION	RESISTIVITY	THICKNESS	FLAT	TTV	BOW/WARP	PARTICLES	SURFACE
N/Phosphorous	<100> +/- 1 deg.	1-20 ohm-cm	381 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched
N/Arsenic	<100> +/- 1 deg.	<0.010 ohm-cm	381 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched
N/Arsenic	<111> +/- 1 deg.	<0.010 ohm-cm	381 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched
N/Antimony	<100> +/- 1 deg.	0.005-0.020 ohm-cm	381 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched
P/Boron	<100> +/- 1 deg.	<0.010 ohm-cm	381 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched
P/Boron	<100> +/- 1 deg.	1-20 ohm-cm	381 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched
P/Boron	<111> +/- 1 deg.	1-20 ohm-cm	381 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched



50 mm
TYPE/DOPANT	ORIENTATION	RESISTIVITY	THICKNESS	FLAT	TTV	BOW/WARP	PARTICLES	SURFACE
N/Phosphorous	<100> +/- 1 deg.	0.01-0.10 ohm-cm	279 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched
N/Phosphorous	<100> +/- 1 deg.	1-20 ohm-cm	279 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched
N/Phosphorous	<111> +/- 1 deg.	0.01-0.10 ohm-cm	279 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched
N/Phosphorous	<111> +/- 1 deg.	1-20 ohm-cm	279 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched
P/Boron	<100> +/- 1 deg.	1-20 ohm-cm	279 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched
P/Boron	<100> +/- 1 deg.	0.010-0.020 ohm-cm	279 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched
P/Boron	<111> +/- 1 deg.	<0.010 ohm-cm	279 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched
P/Boron	<111> +/- 1 deg.	1-20 ohm-cm	279 +/- 25 um	SEMI Standard	<15 um	N/A	<30@>=0.3um	Polished/Etched

Si Wave Co., Ltd. (Taiwan HQ)		Si Wave Co., Ltd. (US)
#1, Alley 45, Lane 727, Chung Hwa Rd.,Yung Kang District, Tainan, Taiwan		E-mail: siwavecorp@gmail.com
Tel: +886-6-302-5286 • E-mail: siwavecorp@gmail.com