THIN
FILM PROCESSING |
- Thermal Oxide
- Low Temp Oxide (LTO)
- Low-K Oxide (K<3)
- PETEOS Oxide
- POCL3 (Phos) Doping & N+ Drive Poly
- Plasma Oxide
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- Silicon Carbide
- Polysilicon
- PECVD Amorphous Silicon
- LPCVD Silicon Nitride
- Plasma Nitride
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- Oxy-Nitride
- SiON
- BPSG
- Photoresist Coating (I-Line/DUV)
- Electroplated Copper (ECP)
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PVD
Metals |
- PVD Al
- PVD Al Alloys
- PVD Cu
- PVD Ti
- PVD TiN
- PVD Ta
- PVD TaN
- PVD W
- PVD WTi (90/10)
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- PVD Cr
- PVD NiV
- PVD NiFe
- PVD ITO (90/10)
- PVD Co
- PVD CoFe
- PVD C
- PVD Si
- PVD Zr
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- PVD Nb
- PVD Mg
- PVD SiO2
- PVD Al2O3
- PVD AlN
- PVD Mo
- PVD Au
- PVD Pt
- PVD Pd
- PVD Ag
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CUSTOM
PROCESSING |
- Oxide Stripping
- Photoresist Stripping
- Metal Stripping
- Wafer Cleaning
- Wafer Polishing
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- Epitaxial Services
- Dicing
- Lapping
- Laser Marking
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- Wafer Reclaiming
- Wafer Thinning
- Wafer Grinding
- Patterning
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Testing |
- Step Heights
- Surface Roughness
- Film Stress
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- Resistance Mapping
- Uniformity Mapping
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- Particle Scanning
- Bow/Warp Measurments
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